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Specialty Gas Delivery Systems
Owner: The Largest Semiconductor Manufacturer In The World
Location: Aloha, Oregon
Since 1985, Evergreen Engineering has designed Specialty Gas Delivery Systems for three (3) successive Semiconductor Manufacturing Fabs at this site. All projects were retrofits within operating facilities, and required detailed design to assure adherence to Building Codes, to assure personnel safety and to assure that construction impacts to production were mitigated or eliminated.
Specialty Gases included:
- Boron Trichloride – BCL3
- Halocarbon 116 – C2F6
- Halocarbon 14 – CF4
- Halocarbon 23 – CHF3
- Chlorine – CL2
- Hydrogen Chloride – HCL
- Helium – HF
- Argon/Helium – Ar/He
- Nitrogen – N2
- Oxygen – O2
- Diborane – B2H6
- Silicon Tetrafluoride – SiCL4
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Specialty Gases included:
- Hydrogen – H2
- Hydrogen Bromide - HBr
- Nitrous Oxide – N2O
- Nitrogen Trifluoride – NF3
- Ammonia – NH32
- Sulfur Hexafluoride – SF6
- Silane – SiH4
- Dichlorosilane – SiH2CL2
- Trichlorosilane - TCS
- Argon – Ar
- Breathable Air
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All projects involved the following Services:
- Code Analysis
- Allowable Quantity Study
- IDLH Calculation at Point of Discharge
- Preliminary and Detail Design
- Preliminary and Final Agency Reviews
- Services During Construction
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